Inventor
KATO SEIMA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KATO SEIMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS7283252B2Oct 16, 2007
Measuring method and apparatus using interference, exposure method and apparatus using the same, and device fabrication method
CANON KK12 citations82
US7952726B2May 31, 2011
Measurement apparatus, exposure apparatus having the same, and device manufacturing method
CANON KK2 citations62
US8004691B2Aug 23, 2011
Measuring apparatus, exposure apparatus and method, and device manufacturing method
CANON KK3 citations61
US7443515B2Oct 28, 2008
Apparatus for measuring optical properties of tested optical system using interference
CANON KK4 citations61
US12385804B2Aug 12, 2025
Optical apparatus, evaluation apparatus, evaluation method, and manufacturing method of optical system
CANON KK0 citations50
US9557241B2Jan 31, 2017
Wavefront aberration measuring method, wavefront aberration measuring apparatus and optical element manufacturing method
CANON KK0 citations50
US7474413B2Jan 6, 2009
Method and apparatus for analyzing interference fringe
CANON KK0 citations50
US7692799B2Apr 6, 2010
Measurement apparatus, exposure apparatus, and device fabrication method
CANON KK0 citations40
KATO SEIMA
5 patentsUS8525982B2Sep 3, 2013
Refractive index distribution measuring method and refractive index distribution measuring apparatus
KATO SEIMA6 citations70
US8508725B2Aug 13, 2013
Refractive index distribution measuring method and apparatus using position measurement and a reference object
KATO SEIMA6 citations70
US8786863B2Jul 22, 2014
Transmitted wavefront measuring method, refractive-index distribution measuring method, and transmitted wavefront measuring apparatus that calculate a frequency distribution and obtain a transmitted wavefront of the object based on a primary frequency spectrum in the frequency distribution
KATO SEIMA2 citations60
US8472013B2Jun 25, 2013
Refractive index distribution measurement method and apparatus that measure transmission wavefronts of a test object immersed in different media having refractive index lower than that of the test object
KATO SEIMA2 citations60
US8477297B2Jul 2, 2013
Refractive index distribution measuring method and apparatus, and method of producing optical element thereof, that use multiple transmission wavefronts of a test object immersed in at least one medium having a different refractive index from that of the test object and multiple reference transmission wavefronts of a reference object having known shape and refractive index distribution
KATO SEIMA1 citations49