Inventor

SIJBEN ANKO JOZEF CORNELUS

NL6 patents

⚠️ This page may combine multiple inventors who share the name “SIJBEN ANKO JOZEF CORNELUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US7940511B2May 10, 2011

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

ASML NETHERLANDS BV25 citations89

US9494875B2Nov 15, 2016

Chuck, a chuck control system, a lithography apparatus and a method of using a chuck

ASML NETHERLANDS BV4 citations70

US10416567B2Sep 17, 2019

Illumination system and metrology system

ASML NETHERLANDS BV2 citations67

JACOBS JOHANNES HENRICUS WILHELMUS

1 patent

US8564763B2Oct 22, 2013

Lithographic apparatus and method

JACOBS JOHANNES HENRICUS WILHELMUS32 citations88

SIJBEN ANKO JOZEF CORNELUS

1 patent

US8098475B2Jan 17, 2012

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

SIJBEN ANKO JOZEF CORNELUS6 citations76

BRINKHOF EUGENE MARIA

1 patent

US9360771B2Jun 7, 2016

Electrostatic clamp, lithographic apparatus, and device manufacturing method

BRINKHOF EUGENE MARIA0 citations44