Inventor

MAAS WOUTERUS JOHANNES PETRUS MARIA

NL3 patents

⚠️ This page may combine multiple inventors who share the name “MAAS WOUTERUS JOHANNES PETRUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JACOBS JOHANNES HENRICUS WILHELMUS

1 patent

US8564763B2Oct 22, 2013

Lithographic apparatus and method

JACOBS JOHANNES HENRICUS WILHELMUS32 citations88

ASML NETHERLANDS BV

1 patent

US7595496B2Sep 29, 2009

Optimized correction of wafer thermal deformations in a lithographic process

ASML NETHERLANDS BV7 citations72

BECKERS MARCEL

1 patent

US8462314B2Jun 11, 2013

Lithographic apparatus and device manufacturing method

BECKERS MARCEL3 citations58