Inventor
KIM SI-BUM
KR11 patents
⚠️ This page may combine multiple inventors who share the name “KIM SI-BUM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
6 patentsUS6767788B2Jul 27, 2004
Semiconductor device having a metal insulator metal capacitor
HYNIX SEMICONDUCTOR INC35 citations91
US6744090B2Jun 1, 2004
Damascene capacitor formed in metal interconnection layer
HYNIX SEMICONDUCTOR INC28 citations91
US6664636B2Dec 16, 2003
Cu film deposition equipment of semiconductor device
HYNIX SEMICONDUCTOR INC8 citations67
US7432151B2Oct 7, 2008
Semiconductor device and method for fabricating the same
HYNIX SEMICONDUCTOR INC4 citations61
US7098133B2Aug 29, 2006
Method of forming copper wiring in a semiconductor device
HYNIX SEMICONDUCTOR INC5 citations61
US6855632B2Feb 15, 2005
Cu film deposition equipment of semiconductor device
HYNIX SEMICONDUCTOR INC0 citations46
HYUNDAI ELECTRONICS IND
2 patentsUS6316349B1Nov 13, 2001
Method for forming contacts of semiconductor devices
HYUNDAI ELECTRONICS IND31 citations89
US6645858B2Nov 11, 2003
Method of catalyzing copper deposition in a damascene structure by plasma treating the barrier layer and then applying a catalyst such as iodine or iodine compounds to the barrier layer
HYUNDAI ELECTRONICS IND9 citations73