Inventor
SALINAS MARTIN JEFF
US13 patents
⚠️ This page may combine multiple inventors who share the name “SALINAS MARTIN JEFF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7972469B2Jul 5, 2011
Plasma processing apparatus
APPLIED MATERIALS INC7 citations84
US9514933B2Dec 6, 2016
Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition
APPLIED MATERIALS INC3 citations73
US10573493B2Feb 25, 2020
Inductively coupled plasma apparatus
APPLIED MATERIALS INC2 citations71
US10468282B2Nov 5, 2019
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations51
US10010912B2Jul 3, 2018
Particle reduction via throttle gate valve purge
APPLIED MATERIALS INC0 citations41
US9857027B2Jan 2, 2018
Apparatus and method for self-regulating fluid chemical delivery
APPLIED MATERIALS INC0 citations39
SOKUDO CO LTD
5 patentsUS7297906B2Nov 20, 2007
Integrated thermal unit having a shuttle with two-axis movement
SOKUDO CO LTD11 citations83
US7282675B2Oct 16, 2007
Integrated thermal unit having a shuttle with a temperature controlled surface
SOKUDO CO LTD14 citations83
US7741585B2Jun 22, 2010
Integrated thermal unit having a shuttle with two-axis movement
SOKUDO CO LTD5 citations62
US7601934B2Oct 13, 2009
Integrated thermal unit having a shuttle with a temperature controlled surface
SOKUDO CO LTD6 citations62
US7427728B2Sep 23, 2008
Zone control heater plate for track lithography systems
SOKUDO CO LTD5 citations62