Inventor
TODOROW VALENTIN
US12 patents
⚠️ This page may combine multiple inventors who share the name “TODOROW VALENTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS8988848B2Mar 24, 2015
Extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC47 citations97
US6818562B2Nov 16, 2004
Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system
APPLIED MATERIALS INC94 citations97
US8933628B2Jan 13, 2015
Inductively coupled plasma source with phase control
APPLIED MATERIALS INC37 citations94
US7837838B2Nov 23, 2010
Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus
APPLIED MATERIALS INC20 citations92
US7645710B2Jan 12, 2010
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
APPLIED MATERIALS INC13 citations83
US10825708B2Nov 3, 2020
Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC2 citations73
US10271416B2Apr 23, 2019
High efficiency triple-coil inductively coupled plasma source with phase control
APPLIED MATERIALS INC2 citations68
US10546731B1Jan 28, 2020
Method, apparatus and system for wafer dechucking using dynamic voltage sweeping
APPLIED MATERIALS INC1 citations61
US9945033B2Apr 17, 2018
High efficiency inductively coupled plasma source with customized RF shield for plasma profile control
APPLIED MATERIALS INC0 citations51