Inventor

SHEYNER ANCHEL

US7 patents

⚠️ This page may combine multiple inventors who share the name “SHEYNER ANCHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US7879183B2Feb 1, 2011

Apparatus and method for front side protection during backside cleaning

APPLIED MATERIALS INC13 citations83

US8360003B2Jan 29, 2013

Plasma reactor with uniform process rate distribution by improved RF ground return path

APPLIED MATERIALS INC5 citations73

US10770328B2Sep 8, 2020

Substrate support with symmetrical feed structure

APPLIED MATERIALS INC0 citations52

US10096494B2Oct 9, 2018

Substrate support with symmetrical feed structure

APPLIED MATERIALS INC0 citations51

LIN XING

2 patents

US9123762B2Sep 1, 2015

Substrate support with symmetrical feed structure

LIN XING40 citations96

US8633423B2Jan 21, 2014

Methods and apparatus for controlling substrate temperature in a process chamber

LIN XING131 citations96

YOUSIF IMAD

1 patent

US8329593B2Dec 11, 2012

Method and apparatus for removing polymer from the wafer backside and edge

YOUSIF IMAD14 citations82