Inventor

BORNEBROEK FRANK

NL3 patents

⚠️ This page may combine multiple inventors who share the name “BORNEBROEK FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7112813B2Sep 26, 2006

Device inspection method and apparatus using an asymmetric marker

ASML NETHERLANDS BV61 citations96

ASM LITHOGRAPHY BV

1 patent

US6297876B1Oct 2, 2001

Lithographic projection apparatus with an alignment system for aligning substrate on mask

ASM LITHOGRAPHY BV255 citations94

VESELINOVIC PETAR

1 patent

US8642235B2Feb 4, 2014

Method of optimizing a die size, method of designing a pattern device manufacturing method, and computer program product

VESELINOVIC PETAR0 citations36