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Inventor

DORAI RAJESH

US12 patents
⚠️ This page may combine multiple inventors who share the name “DORAI RAJESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

7 patents
US7132672B2Nov 7, 2006

Faraday dose and uniformity monitor for plasma based ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT21 citations90
US7812321B2Oct 12, 2010

Techniques for providing a multimode ion source

VARIAN SEMICONDUCTOR EQUIPMENT9 citations82
US7655922B2Feb 2, 2010

Techniques for confining electrons in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT9 citations82
US7767986B2Aug 3, 2010

Method and apparatus for controlling beam current uniformity in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT5 citations62
US8003498B2Aug 23, 2011

Particle beam assisted modification of thin film materials

VARIAN SEMICONDUCTOR EQUIPMENT3 citations59
US8830616B2Sep 9, 2014

Magnetic storage device

VARIAN SEMICONDUCTOR EQUIPMENT0 citations50
US7667208B2Feb 23, 2010

Technique for confining secondary electrons in plasma-based ion implantation

VARIAN SEMICONDUCTOR EQUIPMENT0 citations50

HADIDI KAMAL

2 patents
US8664561B2Mar 4, 2014

System and method for selectively controlling ion composition of ion sources

HADIDI KAMAL7 citations82
US8692468B2Apr 8, 2014

Transformer-coupled RF source for plasma processing tool

HADIDI KAMAL4 citations71

LAM RES CORP

2 patents
US12139791B2Nov 12, 2024

Showerhead faceplates with angled gas distribution passages for semiconductor processing tools

LAM RES CORP0 citations51
US10854492B2Dec 1, 2020

Edge ring assembly for improving feature profile tilting at extreme edge of wafer

LAM RES CORP0 citations38

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent
US9704528B2Jul 11, 2017

Apparatus and method for improved perpendicular recording medium using ion implantation in a magnetic field

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50