Inventor
LEE CHAHN
JP12 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHAHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS10720306B2Jul 21, 2020
Charged particle beam device
HITACHI HIGH TECH CORP4 citations83
US10249474B2Apr 2, 2019
Charged particle beam device
HITACHI HIGH TECH CORP4 citations83
US9697987B2Jul 4, 2017
Charged particle beam device
HITACHI HIGH TECH CORP9 citations83
US11133147B2Sep 28, 2021
Charged particle ray device and cross-sectional shape estimation program
HITACHI HIGH TECH CORP2 citations72
US9786468B2Oct 10, 2017
Charged particle beam device
HITACHI HIGH TECH CORP4 citations72
US9472376B2Oct 18, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US11798780B2Oct 24, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations62
US11239052B2Feb 1, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations62
US10290464B2May 14, 2019
Charged particle beam device and pattern measurement device
HITACHI HIGH TECH CORP0 citations52