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Inventor
NIIBORI TETSUYA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “NIIBORI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
1 patent
US10056226B2
Aug 21, 2018
Charged particle beam apparatus and vibration damper for charged particle beam apparatus
HITACHI HIGH TECH CORP
2 citations
69
SHIMURA KEI
1 patent
US9851548B2
Dec 26, 2017
Optical microscope device and testing apparatus comprising same
SHIMURA KEI
2 citations
67