Inventor
NAKAI NAOYA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “NAKAI NAOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS10641607B2May 5, 2020
Height detection apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP5 citations71
US11959735B2Apr 16, 2024
Height measuring device and beam irradiation device
HITACHI HIGH TECH CORP4 citations70
US9104118B2Aug 11, 2015
Exposure device and method for producing structure
HITACHI HIGH TECH CORP0 citations48