Inventor

BIBBY THOMAS FREDERICK ALLEN

US3 patents

Patents

3 patents

US10095118B2Oct 9, 2018

Lithography optics adjustment and monitoring

Cymer LLC4 citations64

US10267687B2Apr 23, 2019

Adjusting an amount of coherence of a light beam

Cymer LLC0 citations49

US9945730B2Apr 17, 2018

Adjusting an amount of coherence of a light beam

Cymer LLC1 citations49