Inventor

THORNES JOSHUA JON

US22 patents

⚠️ This page may combine multiple inventors who share the name “THORNES JOSHUA JON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

THORNES JOSHUA JON

Cymer LLC

Spectral feature selection and pulse timing control of a pulsed light beam

Reducing speckle in an excimer light source

Reducing speckle in an excimer light source

Control of a spectral feature of a pulsed light beam

Online calibration for repetition rate dependent performance variables

Lithography optics adjustment and monitoring

Spectral feature selection and pulse timing control of a pulsed light beam

Reducing speckle in an excimer light source

Forming multiple aerial images in a single lithography exposure pass

Forming multiple aerial images in a single lithography exposure pass

Online calibration for repetition rate dependent performance variables

Control system for a plurality of deep ultraviolet optical oscillators

Fluorine detection in a gas discharge light source

Apparatus for and method of generating multiple laser beams

Monitoring system for an optical lithography system

Online calibration for repetition rate dependent performance variables

Adjusting an amount of coherence of a light beam

Adjusting an amount of coherence of a light beam

ASML NETHERLANDS BV

Lithographic apparatus and method

Method and apparatus for imaging using narrowed bandwidth

O'BRIEN KEVIN MICHAEL

System and method for automatic gas optimization in a two-chamber gas discharge laser system

JIANG RUI

System and method for high accuracy gas refill in a two chamber gas discharge laser system