Inventor
CHANG GENG-SHUOH
TW5 patents
Patents
5 patentsUS9761592B2Sep 12, 2017
Structure and formation method of semiconductor device with embedded capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US9953861B2Apr 24, 2018
Semiconductor device having a shallow trench isolation structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9209071B2Dec 8, 2015
Semiconductor structure with anti-etch structure in via and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10153285B2Dec 11, 2018
Formation method of semiconductor device with embedded capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10867838B2Dec 15, 2020
Semiconductor device having a shallow trench isolation structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47