P

Inventor

TOMIOKA KAZUHIRO

JP38 patents
⚠️ This page may combine multiple inventors who share the name “TOMIOKA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

16 patents
US5897713AApr 27, 1999

Plasma generating apparatus

TOSHIBA KK161 citations99
US5810963ASep 22, 1998

Plasma processing apparatus and method

TOSHIBA KK157 citations99
US5302240AApr 12, 1994

Method of manufacturing semiconductor device

TOSHIBA KK200 citations99
US5445710AAug 29, 1995

Method of manufacturing semiconductor device

TOSHIBA KK86 citations96
US6780278B2Aug 24, 2004

Plasma processing apparatus with reduced parasitic capacity and loss in RF power

TOSHIBA KK16 citations84
US7015049B2Mar 21, 2006

Fence-free etching of iridium barrier having a steep taper angle

TOSHIBA KK11 citations83
US8987007B2Mar 24, 2015

Method of manufacturing a semiconductor device having a magnetic film using plasma etching

TOSHIBA KK4 citations73
US7589014B2Sep 15, 2009

Semiconductor device having multiple wiring layers and method of producing the same

TOSHIBA KK1 citations63
US7400005B2Jul 15, 2008

Semiconductor memory device having ferroelectric capacitors with hydrogen barriers

TOSHIBA KK5 citations63
US7042705B2May 9, 2006

Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing

TOSHIBA KK3 citations62
US7504680B2Mar 17, 2009

Semiconductor device and mask pattern

TOSHIBA KK2 citations59
US7045837B2May 16, 2006

Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing

TOSHIBA KK5 citations59
US9287495B2Mar 15, 2016

Method of manufacturing semiconductor device

TOSHIBA KK1 citations52
US7855141B2Dec 21, 2010

Semiconductor device having multiple wiring layers and method of producing the same

TOSHIBA KK0 citations52
US7745326B2Jun 29, 2010

Semiconductor device having multiple wiring layers and method of producing the same

TOSHIBA KK0 citations52
US7767582B2Aug 3, 2010

Method of manufacturing semiconductor device

TOSHIBA KK1 citations51

TOSHIBA MEMORY CORP

6 patents

KIOXIA CORP

5 patents

YOSHIKAWA MASATOSHI

4 patents

TOMIOKA KAZUHIRO

4 patents

INFINEON TECHNOLOGIES AG

2 patents

TSUBATA SHUICHI

1 patent