Inventor
EGGER ULRICH
DE16 patents
⚠️ This page may combine multiple inventors who share the name “EGGER ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
11 patentsUS6746877B1Jun 8, 2004
Encapsulation of ferroelectric capacitors
INFINEON TECHNOLOGIES AG14 citations83
US7071506B2Jul 4, 2006
Device for inhibiting hydrogen damage in ferroelectric capacitor devices
INFINEON TECHNOLOGIES AG9 citations73
US6762064B1Jul 13, 2004
Process for fabrication of a ferrocapacitor
INFINEON TECHNOLOGIES AG8 citations73
US6924156B2Aug 2, 2005
Method for forming a ferroelectric capacitor device
INFINEON TECHNOLOGIES AG3 citations62
US6897501B2May 24, 2005
Avoiding shorting in capacitors
INFINEON TECHNOLOGIES AG4 citations61
US7316980B2Jan 8, 2008
Method for forming ferrocapacitors and FeRAM devices
INFINEON TECHNOLOGIES AG1 citations51
US7098142B2Aug 29, 2006
Method of etching ferroelectric devices
INFINEON TECHNOLOGIES AG1 citations51
US7001781B2Feb 21, 2006
Method for producing a ferroelectric capacitor that includes etching with hardmasks
INFINEON TECHNOLOGIES AG0 citations51
US6867053B2Mar 15, 2005
Fabrication of a FeRAM capacitor using a noble metal hardmask
INFINEON TECHNOLOGIES AG0 citations51
US6785119B2Aug 31, 2004
Ferroelectric capacitor and process for its manufacture
INFINEON TECHNOLOGIES AG0 citations51
US6734057B2May 11, 2004
Method of patterning capacitors and capacitors made thereby
INFINEON TECHNOLOGIES AG1 citations51
TOSHIBA KK
5 patentsUS7015049B2Mar 21, 2006
Fence-free etching of iridium barrier having a steep taper angle
TOSHIBA KK11 citations83
US7042705B2May 9, 2006
Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processing
TOSHIBA KK3 citations62
US7504680B2Mar 17, 2009
Semiconductor device and mask pattern
TOSHIBA KK2 citations59
US7045837B2May 16, 2006
Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing
TOSHIBA KK5 citations59
US7001780B2Feb 21, 2006
Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method
TOSHIBA KK0 citations51