Inventor

SHIN HYUNG JOO

US4 patents

⚠️ This page may combine multiple inventors who share the name “SHIN HYUNG JOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US9620377B2Apr 11, 2017

Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch

LAM RES CORP25 citations93

US10170323B2Jan 1, 2019

Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch

LAM RES CORP11 citations82

IBM

2 patents

US10249533B1Apr 2, 2019

Method and structure for forming a replacement contact

IBM6 citations71

US10167558B1Jan 1, 2019

Phase shifted gas delivery for high throughput and cost effectiveness associated with atomic layer etching and atomic layer deposition

IBM0 citations40