Inventor
KONO MICHIO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KONO MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS7864296B2Jan 4, 2011
Exposure apparatus, setting method, and exposure method having the same
CANON KK11 citations83
US11448969B2Sep 20, 2022
Illumination optical system, exposure apparatus, and article manufacturing method
CANON KK3 citations69
US10067325B2Sep 4, 2018
Projection optical system, exposure apparatus, and article manufacturing method
CANON KK2 citations67
US10921717B2Feb 16, 2021
Exposure apparatus and article manufacturing method
CANON KK0 citations59
US11966043B2Apr 23, 2024
Imaging optical system, exposure apparatus, and article manufacturing method
CANON KK0 citations48
US11215930B2Jan 4, 2022
Exposure apparatus, and article manufacturing method
CANON KK0 citations48
US11099488B2Aug 24, 2021
Exposure apparatus and article manufacturing method
CANON KK0 citations48
US10578846B2Mar 3, 2020
Projection optical system, exposure apparatus, and article manufacturing method
CANON KK0 citations46