Inventor
CHEN CHING-YUEH
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHING-YUEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS10126666B2Nov 13, 2018
Apparatus and a method of forming a particle shield
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10168626B2Jan 1, 2019
Apparatus and a method of forming a particle shield
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11402743B2Aug 2, 2022
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12124163B2Oct 22, 2024
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11860530B2Jan 2, 2024
Mask defect prevention
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10969682B2Apr 6, 2021
Apparatus and method for developing a photoresist coated substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10698313B2Jun 30, 2020
Apparatus and method for developing a photoresist coated substrate
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11226551B2Jan 18, 2022
Lithographic mask, a pellicle therein and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12287581B2Apr 29, 2025
Method of manufacturing semiconductor devices using a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10788764B2Sep 29, 2020
Apparatus and a method of forming a particle shield
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10802395B2Oct 13, 2020
Lithographic mask, a pellicle therein and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48