Inventor
BERENDSEN CHRISTIANUS WILHELMUS JOHANNES
NL13 patents
Patents
13 patentsUS9983489B2May 29, 2018
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
ASML NETHERLANDS BV5 citations71
US12429778B2Sep 30, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11720032B2Aug 8, 2023
Process tool and an inspection method
ASML NETHERLANDS BV0 citations59
USRE49142EJul 19, 2022
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations59
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US10948825B2Mar 16, 2021
Method for removing photosensitive material on a substrate
ASML NETHERLANDS BV1 citations57
US12287580B2Apr 29, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations56
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56
US12566382B2Mar 3, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10018926B2Jul 10, 2018
Lithographic apparatus and method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US9939738B2Apr 10, 2018
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations48
US10216095B2Feb 26, 2019
Immersion lithographic apparatus
ASML NETHERLANDS BV0 citations39