Inventor
ERSHOV ALEXANDER IGOREVICH
US10 patents
Patents
10 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US9693440B1Jun 27, 2017
EUV LPP source with improved dose control by tracking dose over specified window
ASML NETHERLANDS BV3 citations70
US10681795B2Jun 9, 2020
Apparatus for and method of source material delivery in a laser produced plasma EUV light source
ASML NETHERLANDS BV1 citations61
US12452986B2Oct 21, 2025
Nozzle apparatus
ASML NETHERLANDS BV0 citations58
US11690159B2Jun 27, 2023
Apparatus and method for extending target material delivery system lifetime
ASML NETHERLANDS BV0 citations58
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56
US12222050B2Feb 11, 2025
Robust fluid coupling apparatus
ASML NETHERLANDS BV0 citations43