Inventor
TSENG HUAN-CHI
TW19 patents
⚠️ This page may combine multiple inventors who share the name “TSENG HUAN-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
10 patentsUS5949547ASep 7, 1999
System for in-line monitoring of photo processing in VLSI fabrication
TAIWAN SEMICONDUCTOR MFG37 citations92
US8978003B1Mar 10, 2015
Method of making semiconductor device and a control system for performing the same
TAIWAN SEMICONDUCTOR MFG10 citations84
US7015129B2Mar 21, 2006
Bond pad scheme for Cu process
TAIWAN SEMICONDUCTOR MFG7 citations73
US5990567ANov 23, 1999
System for in-line monitoring of photo processing tilt in VLSI fabrication
TAIWAN SEMICONDUCTOR MFG6 citations73
US5685947ANov 11, 1997
Chemical-mechanical polishing with an embedded abrasive
TAIWAN SEMICONDUCTOR MFG8 citations73
US7545045B2Jun 9, 2009
Dummy via for reducing proximity effect and method of using the same
TAIWAN SEMICONDUCTOR MFG9 citations72
US6943062B2Sep 13, 2005
Contaminant particle removal by optical tweezers
TAIWAN SEMICONDUCTOR MFG11 citations68
US7160811B2Jan 9, 2007
Laminated silicate glass layer etch stop method for fabricating microelectronic product
TAIWAN SEMICONDUCTOR MFG5 citations62
US6844626B2Jan 18, 2005
Bond pad scheme for Cu process
TAIWAN SEMICONDUCTOR MFG3 citations62
US9075101B2Jul 7, 2015
Method and apparatus for testing a semiconductor device
TAIWAN SEMICONDUCTOR MFG2 citations59
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10520545B2Dec 31, 2019
Method and apparatus for testing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US11150296B2Oct 19, 2021
Method and apparatus for testing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9639647B2May 2, 2017
Method of making semiconductor device and system for performing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9995770B2Jun 12, 2018
Multidirectional semiconductor arrangement testing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations47