Inventor
FOMENKOV IGOR VLADIMIROVICH
US14 patents
⚠️ This page may combine multiple inventors who share the name “FOMENKOV IGOR VLADIMIROVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US9462668B2Oct 4, 2016
Target for extreme ultraviolet light source
ASML NETHERLANDS BV3 citations68
US11266002B2Mar 1, 2022
System for monitoring a plasma
ASML NETHERLANDS BV3 citations67
US12078934B2Sep 3, 2024
Laser system for target metrology and alteration in an EUV light source
ASML NETHERLANDS BV0 citations62
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US12287455B2Apr 29, 2025
Oxygen-loss resistant top coating for optical elements
ASML NETHERLANDS BV0 citations56
US12171053B2Dec 17, 2024
System for monitoring a plasma
ASML NETHERLANDS BV0 citations56
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56
US12369244B2Jul 22, 2025
Laser system for source material conditioning in an EUV light source
ASML NETHERLANDS BV0 citations51
US10663866B2May 26, 2020
Wavelength-based optical filtering
ASML NETHERLANDS BV0 citations39