Inventor
HUMMLER KLAUS MARTIN
US8 patents
Patents
8 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US11266002B2Mar 1, 2022
System for monitoring a plasma
ASML NETHERLANDS BV3 citations67
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US12287455B2Apr 29, 2025
Oxygen-loss resistant top coating for optical elements
ASML NETHERLANDS BV0 citations56
US12171053B2Dec 17, 2024
System for monitoring a plasma
ASML NETHERLANDS BV0 citations56
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56