Inventor
LaForge Andrew David
US11 patents
Patents
11 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US11347154B2May 31, 2022
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV3 citations70
US11874608B2Jan 16, 2024
Apparatus for and method of reducing contamination from source material in an EUV light source
ASML NETHERLANDS BV1 citations61
US12189313B2Jan 7, 2025
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV0 citations59
US10904993B2Jan 26, 2021
Reducing the effect of plasma on an object in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations59
US10349509B2Jul 9, 2019
Reducing the effect of plasma on an object in an extreme ultraviolet light source
ASML NETHERLANDS BV1 citations59
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US12287455B2Apr 29, 2025
Oxygen-loss resistant top coating for optical elements
ASML NETHERLANDS BV0 citations56
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56