Inventor
LANGLOIS MARC GUY
US7 patents
⚠️ This page may combine multiple inventors who share the name “LANGLOIS MARC GUY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS10901329B2Jan 26, 2021
EUV cleaning systems and methods thereof for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations58
US10606180B2Mar 31, 2020
EUV cleaning systems and methods thereof for an extreme ultraviolet light source
ASML NETHERLANDS BV1 citations58
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56
US11740565B2Aug 29, 2023
Collector flow ring
ASML NETHERLANDS BV0 citations53