Inventor
NADIR KERIM
NL4 patents
Patents
4 patentsUS10222701B2Mar 5, 2019
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
ASML NETHERLANDS BV11 citations78
US12389519B2Aug 12, 2025
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US11822252B2Nov 21, 2023
Guiding device and associated system
ASML NETHERLANDS BV1 citations56