Inventor
STEWART IV JOHN TOM
US9 patents
Patents
9 patentsUS9357625B2May 31, 2016
Extreme ultraviolet light source
ASML NETHERLANDS BV11 citations79
US9338870B2May 10, 2016
Extreme ultraviolet light source
ASML NETHERLANDS BV3 citations72
US11347154B2May 31, 2022
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV3 citations70
US10064261B2Aug 28, 2018
Extreme ultraviolet light source
ASML NETHERLANDS BV3 citations68
US12189313B2Jan 7, 2025
Cleaning a structure surface in an EUV chamber
ASML NETHERLANDS BV0 citations59
US10955749B2Mar 23, 2021
Guiding device and associated system
ASML NETHERLANDS BV0 citations57
US9826616B2Nov 21, 2017
Extreme ultraviolet light source utilizing a target of finite extent
ASML NETHERLANDS BV0 citations49
US10490313B2Nov 26, 2019
Method of controlling debris in an EUV light source
ASML NETHERLANDS BV0 citations48
US10128017B1Nov 13, 2018
Apparatus for and method of controlling debris in an EUV light source
ASML NETHERLANDS BV1 citations48