Inventor
KOYANAGI MITSUMASA
JP27 patents
⚠️ This page may combine multiple inventors who share the name “KOYANAGI MITSUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
9 patentsUS4701349AOct 20, 1987
Semiconductor integrated circuit device and method of producing the same
HITACHI LTD68 citations96
US4901128AFeb 13, 1990
Semiconductor memory
HITACHI LTD25 citations93
US5021842AJun 4, 1991
Trench DRAM cell with different insulator thicknesses
HITACHI LTD24 citations92
US4355374AOct 19, 1982
Semiconductor memory device
HITACHI LTD45 citations92
US4151607AApr 24, 1979
Semiconductor memory device
HITACHI LTD50 citations92
US4891326AJan 2, 1990
Semiconductor device and a process for manufacturing the same
HITACHI LTD22 citations82
US4016007AApr 5, 1977
Method for fabricating a silicon device utilizing ion-implantation and selective oxidation
HITACHI LTD31 citations80
US5237528AAug 17, 1993
Semiconductor memory
HITACHI LTD18 citations74
US5214496AMay 25, 1993
Semiconductor memory
HITACHI LTD13 citations74
ZYCUBE CO LTD
4 patentsUS7906363B2Mar 15, 2011
Method of fabricating semiconductor device having three-dimensional stacked structure
ZYCUBE CO LTD41 citations92
US7265402B2Sep 4, 2007
Solid-state image sensor including a microlens
ZYCUBE CO LTD44 citations92
US7091534B2Aug 15, 2006
Semiconductor device using low dielectric constant material film and method of fabricating the same
ZYCUBE CO LTD13 citations83
US7326642B2Feb 5, 2008
Method of fabricating semiconductor device using low dielectric constant material film
ZYCUBE CO LTD0 citations51
ASAHI GLASS CO LTD
3 patentsUS7355238B2Apr 8, 2008
Nonvolatile semiconductor memory device having nanoparticles for charge retention
ASAHI GLASS CO LTD60 citations97
US7550802B2Jun 23, 2009
Nonvolatile semiconductor memory device and manufacturing process of the same
ASAHI GLASS CO LTD18 citations83
US7820515B2Oct 26, 2010
Nonvolatile semiconductor memory element excellent in charge retention properties and process for producing the same
ASAHI GLASS CO LTD0 citations41
KOYANAGI MITSUMASA
3 patentsUS6525415B2Feb 25, 2003
Three-dimensional semiconductor integrated circuit apparatus and manufacturing method therefor
KOYANAGI MITSUMASA41 citations91
US8283208B2Oct 9, 2012
Method and apparatus for fabricating integrated circuit device using self-organizing function
KOYANAGI MITSUMASA8 citations83
US8722460B2May 13, 2014
Method and apparatus for fabricating integrated circuit device using self-organizing function
KOYANAGI MITSUMASA2 citations61
UNIV TOHOKU
3 patentsUS9449948B2Sep 20, 2016
Chip support substrate, chip support method, three-dimensional integrated circuit, assembly device, and fabrication method of three-dimensional integrated circuit
UNIV TOHOKU3 citations73
US10483240B2Nov 19, 2019
Semiconductor device and method for manufacturing the same
UNIV TOHOKU0 citations52
US10177118B2Jan 8, 2019
Semiconductor device and method for manufacturing the same
UNIV TOHOKU0 citations52