Inventor
NAOHARA HIDEJI
JP20 patents
Patents
20 patentsUS12008022B2Jun 11, 2024
Data processing method, data processing device, and storage medium
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US11322415B2May 3, 2022
Substrate treatment method and substrate treatment device
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US10985038B2Apr 20, 2021
Determination method and substrate processing equipment
SCREEN HOLDINGS CO LTD6 citations71
US10651064B2May 12, 2020
Substrate treatment device and substrate treatment method
SCREEN HOLDINGS CO LTD2 citations71
US12322600B2Jun 3, 2025
Substrate treatment apparatus, substrate treatment method, substrate treatment system, and learning data generation method
SCREEN HOLDINGS CO LTD1 citations63
US11099105B2Aug 24, 2021
Data processing method, data processing device, and non-transitory computer-readable recording medium having recorded thereon data processing program
SCREEN HOLDINGS CO LTD1 citations62
US12211197B2Jan 28, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11908752B2Feb 20, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US11646212B2May 9, 2023
Substrate treatment device
SCREEN HOLDINGS CO LTD0 citations61
US11054801B2Jul 6, 2021
Data processing method, data processing apparatus, data processing system, and recording medium having recorded therein data processing program
SCREEN HOLDINGS CO LTD1 citations61
US11011398B2May 18, 2021
Fume determination method, substrate processing method, and substrate processing equipment
SCREEN HOLDINGS CO LTD0 citations61
US12271448B2Apr 8, 2025
Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon
SCREEN HOLDINGS CO LTD0 citations59
US11829451B2Nov 28, 2023
Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon
SCREEN HOLDINGS CO LTD0 citations59
US11274995B2Mar 15, 2022
Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program
SCREEN HOLDINGS CO LTD1 citations59
US11243862B2Feb 8, 2022
Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon
SCREEN HOLDINGS CO LTD0 citations59
US12478997B2Nov 25, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations58
US11474150B2Oct 18, 2022
Data processing method, data processing device, and non-transitory computer-readable recording medium
SCREEN HOLDINGS CO LTD0 citations51
US11294537B2Apr 5, 2022
Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program
SCREEN HOLDINGS CO LTD0 citations49
US12278083B2Apr 15, 2025
Substrate holder state detection device and substrate holder state detection method
SCREEN HOLDINGS CO LTD0 citations48
US12465955B2Nov 11, 2025
Substrate treatment method and substrate treatment device
SCREEN HOLDINGS CO LTD0 citations46