Inventor
FUKUYO TOMOYUKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUKUYO TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHOWA DENKO KK
4 patentsUS11807837B2Nov 7, 2023
Composition, method for cleaning adhesive polymer, method for producing device wafer, and method for regenerating support wafer
SHOWA DENKO KK1 citations56
US11164751B2Nov 2, 2021
Etching method
SHOWA DENKO KK0 citations55
US7572428B2Aug 11, 2009
Process for producing fluorine gas
SHOWA DENKO KK0 citations47
US12221595B2Feb 11, 2025
Decomposing/cleaning composition, method for cleaning adhesive polymer, and method for producing device wafer
SHOWA DENKO KK0 citations46