Inventor
SAITO YASUKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAITO YASUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
3 patentsUS7664307B2Feb 16, 2010
Photomask manufacturing support system
NEC CORP2 citations57
US7577287B2Aug 18, 2009
Early error detection during fabrication of reticles
NEC CORP0 citations36
US7441226B2Oct 21, 2008
Method, system, apparatus and program for programming defect data for evaluation of reticle inspection apparatus
NEC CORP0 citations36