Inventor
AZPEITIA URQUIA MIKEL
IT9 patents
Patents
9 patentsUS11513016B2Nov 29, 2022
Semiconductor device for ambient sensing including a cavity and a mechanical filtering structure
ST MICROELECTRONICS SRL2 citations70
US11358862B2Jun 14, 2022
Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
ST MICROELECTRONICS SRL0 citations61
US11802805B2Oct 31, 2023
Semiconductor device for ambient sensing including a cavity and a mechanical filtering structure
ST MICROELECTRONICS SRL0 citations60
US12113140B2Oct 8, 2024
Method of manufacturing an integrated component with improved spatial occupation, and integrated component
ST MICROELECTRONICS SRL0 citations57
US11276789B2Mar 15, 2022
Method of manufacturing an integrated component with improved spatial occupation, and integrated component
ST MICROELECTRONICS SRL0 citations57
US10676347B2Jun 9, 2020
Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
ST MICROELECTRONICS SRL0 citations51
US12486162B2Dec 2, 2025
Method for manufacturing a capacitive pressure sensor and capacitive pressure sensor
ST MICROELECTRONICS SRL0 citations47
US10125009B2Nov 13, 2018
Multi-chamber multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module
ST MICROELECTRONICS SRL0 citations40
US9388038B2Jul 12, 2016
Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof
ST MICROELECTRONICS SRL0 citations37