Inventor
TSUTSUI TAKURO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TSUTSUI TAKURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11598007B2Mar 7, 2023
Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method
TOKYO ELECTRON LTD5 citations70
US12327186B2Jun 10, 2025
Abnormality detecting device and abnormality detecting method
TOKYO ELECTRON LTD1 citations58
US12480756B2Nov 25, 2025
Virtual metrology apparatus, virtual metrology method, and virtual metrology program
TOKYO ELECTRON LTD0 citations46
US12176227B2Dec 24, 2024
State determination device, state determination method, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations43