Inventor

TURNER TERRY R

US10 patents

⚠️ This page may combine multiple inventors who share the name “TURNER TERRY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IFIRE TECHNOLOGIES INC

2 patents

US6794272B2Sep 21, 2004

Wafer thinning using magnetic mirror plasma

IFIRE TECHNOLOGIES INC93 citations95

US7118992B2Oct 10, 2006

Wafer thinning using magnetic mirror plasma

IFIRE TECHNOLOGIES INC6 citations71

TURNER TERRY R

2 patents

US7345428B2Mar 18, 2008

Transducer package for process control

TURNER TERRY R24 citations89

US7403764B2Jul 22, 2008

RF power delivery diagnostic system

TURNER TERRY R10 citations81

TEXAS INSTRUMENTS INC

2 patents

US5746835AMay 5, 1998

Retractable probe system with in situ fabrication environment process parameter sensing

TEXAS INSTRUMENTS INC14 citations72

US5716878AFeb 10, 1998

Retractable probe system with in situ fabrication environment process parameter sensing

TEXAS INSTRUMENTS INC11 citations72

FOURTH STATE TECHNOLOGY INC

1 patent

US5576629ANov 19, 1996

Plasma monitoring and control method and system

FOURTH STATE TECHNOLOGY INC717 citations94

TURNER ENTPR & ASSOCIATES

1 patent

US8010084B2Aug 30, 2011

RF power delivery diagnostic system

TURNER ENTPR & ASSOCIATES11 citations79

INFICON INC

1 patent

US7728250B2Jun 1, 2010

RF sensor clamp assembly

INFICON INC2 citations60

HORIBA STEC CO LTD

1 patent

US12562358B2Feb 24, 2026

System and method for detecting endpoint in plasma processing

HORIBA STEC CO LTD0 citations52