Inventor
CORBOY JR JOHN F
10 patents
Patents
10 patentsUS4578142AMar 25, 1986
Method for growing monocrystalline silicon through mask layer
RCA CORP101 citations95
US4482422ANov 13, 1984
Method for growing a low defect monocrystalline layer on a mask
RCA CORP70 citations95
US4615762AOct 7, 1986
Method for thinning silicon
RCA CORP97 citations94
US4592792AJun 3, 1986
Method for forming uniformly thick selective epitaxial silicon
RCA CORP47 citations92
US4557794ADec 10, 1985
Method for forming a void-free monocrystalline epitaxial layer on a mask
RCA CORP31 citations92
US4549926AOct 29, 1985
Method for growing monocrystalline silicon on a mask layer
RCA CORP53 citations92
US4352017ASep 28, 1982
Apparatus for determining the quality of a semiconductor surface
RCA CORP33 citations91
US4698316AOct 6, 1987
Method of depositing uniformly thick selective epitaxial silicon
RCA CORP42 citations90
US4586240AMay 6, 1986
Vertical IGFET with internal gate and method for making same
RCA CORP21 citations81
US4546375AOct 8, 1985
Vertical IGFET with internal gate and method for making same
RCA CORP12 citations73