Inventor
MASHIKO YOJI
JP16 patents
Patents
16 patentsUS5112771AMay 12, 1992
Method of fibricating a semiconductor device having a trench
MITSUBISHI ELECTRIC CORP90 citations96
US4962059AOct 9, 1990
Process for forming electrodes for semiconductor devices using focused ion beam deposition
MITSUBISHI ELECTRIC CORP19 citations82
US4853341AAug 1, 1989
Process for forming electrodes for semiconductor devices using focused ion beams
MITSUBISHI ELECTRIC CORP23 citations82
US4314874AFeb 9, 1982
Method for forming a fine pattern of an aluminum film
MITSUBISHI ELECTRIC CORP28 citations79
US4691078ASep 1, 1987
Aluminum circuit to be disconnected and method of cutting the same
MITSUBISHI ELECTRIC CORP14 citations74
US4636400AJan 13, 1987
Method of treating silicon nitride film formed by plasma deposition
MITSUBISHI ELECTRIC CORP11 citations74
US4414242ANov 8, 1983
Process for fabricating a semiconductor device
MITSUBISHI ELECTRIC CORP15 citations74
US5130273AJul 14, 1992
Method for manufacturing a read only memory device using a focused ion beam to alter superconductivity
MITSUBISHI ELECTRIC CORP5 citations73
US4990489AFeb 5, 1991
Read only memory device including a superconductive electrode
MITSUBISHI ELECTRIC CORP10 citations73
US5162233ANov 10, 1992
Method of detecting and analyzing impurities
MITSUBISHI ELECTRIC CORP16 citations70
US4377734AMar 22, 1983
Method for forming patterns by plasma etching
MITSUBISHI ELECTRIC CORP14 citations70
US5043290AAug 27, 1991
Process for forming electrodes for semiconductor devices by focused ion beam technology
MITSUBISHI ELECTRIC CORP2 citations63
US4948749AAug 14, 1990
Process for forming electrodes for semiconductor devices
MITSUBISHI ELECTRIC CORP3 citations63
US4843238AJun 27, 1989
Method for identifying a blistered film in layered films
MITSUBISHI ELECTRIC CORP2 citations63
US4723062AFeb 2, 1988
Aluminum circuit to be disconnected and method of cutting the same
MITSUBISHI ELECTRIC CORP4 citations63
US6545470B2Apr 8, 2003
Scanning probe microscope
MITSUBISHI ELECTRIC CORP3 citations60