Inventor
WEEKS DON J
US9 patents
Patents
9 patentsUS5018210AMay 21, 1991
Pattern comparator with substage illumination and polygonal data representation
TEXAS INSTRUMENTS INC100 citations95
US5001764AMar 19, 1991
Guardbands for pattern inspector
TEXAS INSTRUMENTS INC87 citations95
US5592211AJan 7, 1997
Laser pattern/inspector with a linearly ramped chirp deflector
TEXAS INSTRUMENTS INC19 citations92
US5018212AMay 21, 1991
Defect area consolidation for pattern inspector
TEXAS INSTRUMENTS INC29 citations92
US5027132AJun 25, 1991
Position compensation of laser scan for stage movement
TEXAS INSTRUMENTS INC39 citations91
US4969200ANov 6, 1990
Target autoalignment for pattern inspector or writer
TEXAS INSTRUMENTS INC20 citations79
US4984282AJan 8, 1991
Parallel processing of reference and guardband data
TEXAS INSTRUMENTS INC12 citations72
US5046110ASep 3, 1991
Comparator error filtering for pattern inspector
TEXAS INSTRUMENTS INC16 citations68
US4991977AFeb 12, 1991
Smoothing filter for stage position pulses
TEXAS INSTRUMENTS INC4 citations58