Inventor

HARA KEITARO

JP3 patents

Patents

3 patents

US5396067AMar 7, 1995

Scan type electron microscope

NIKON CORP63 citations94

US5563411AOct 8, 1996

Scanning photoelectron microscope

NIKON CORP13 citations71

US5446282AAug 29, 1995

Scanning photoelectron microscope

NIKON CORP4 citations60