Inventor
DIX MARK
US5 patents
Patents
5 patentsUS6091498AJul 18, 2000
Semiconductor processing apparatus having lift and tilt mechanism
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US6672820B1Jan 6, 2004
Semiconductor processing apparatus having linear conveyer system
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US7002698B2Feb 21, 2006
Semiconductor processing apparatus having lift and tilt mechanism
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US6645355B2Nov 11, 2003
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC54 citations95
US6654122B1Nov 25, 2003
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC31 citations92