Inventor

KAGEYAMA KANEO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KAGEYAMA KANEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

3 patents

US5659174AAug 19, 1997

Scanning electron microscope

HITACHI LTD40 citations87

US6323498B1Nov 27, 2001

Charged particle beam irradiation apparatus and irradiation method using the apparatus

HITACHI LTD5 citations58

US6693288B2Feb 17, 2004

Charged particle beam irradiation apparatus and irradiation method using the apparatus

HITACHI LTD1 citations48

HITACHI HIGH TECH CORP

1 patent

US7598497B2Oct 6, 2009

Charged particle beam scanning method and charged particle beam apparatus

HITACHI HIGH TECH CORP45 citations90