Inventor
BERTRAND JACQUES J
US10 patents
Patents
10 patentsUS6562718B1May 13, 2003
Process for forming fully silicided gates
ADVANCED MICRO DEVICES INC107 citations98
US6432817B1Aug 13, 2002
Tungsten silicide barrier for nickel silicidation of a gate electrode
ADVANCED MICRO DEVICES INC29 citations92
US6507123B1Jan 14, 2003
Nickel silicide process using UDOX to prevent silicide shorting
ADVANCED MICRO DEVICES INC16 citations84
US6841449B1Jan 11, 2005
Two-step process for nickel deposition
ADVANCED MICRO DEVICES INC12 citations83
US6627504B1Sep 30, 2003
Stacked double sidewall spacer oxide over nitride
ADVANCED MICRO DEVICES INC18 citations83
US6605513B2Aug 12, 2003
Method of forming nickel silicide using a one-step rapid thermal anneal process and backend processing
ADVANCED MICRO DEVICES INC16 citations83
US6730587B1May 4, 2004
Titanium barrier for nickel silicidation of a gate electrode
ADVANCED MICRO DEVICES INC7 citations73
US6632740B1Oct 14, 2003
Two-step process for nickel deposition
ADVANCED MICRO DEVICES INC12 citations73
US6541866B1Apr 1, 2003
Cobalt barrier for nickel silicidation of a gate electrode
ADVANCED MICRO DEVICES INC7 citations73
US7023059B1Apr 4, 2006
Trenches to reduce lateral silicide growth in integrated circuit technology
ADVANCED MICRO DEVICES INC6 citations62