Inventor
KANG DAE-KEUN
KR5 patents
Patents
5 patentsUS7326619B2Feb 5, 2008
Method of manufacturing integrated circuit device including recessed channel transistor
SAMSUNG ELECTRONICS CO LTD10 citations82
US7531414B2May 12, 2009
Method of manufacturing integrated circuit device including recessed channel transistor
SAMSUNG ELECTRONICS CO LTD4 citations61
US6831012B2Dec 14, 2004
Method for forming a silicide film of a semiconductor device
SAMSUNG ELECTRONICS CO LTD5 citations61
US7582539B2Sep 1, 2009
Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations60
US7527921B2May 5, 2009
Method of treating and removing a photoresist pattern and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations50