Inventor
FLANNERY JR ANTHONY FRANCIS
US8 patents
⚠️ This page may combine multiple inventors who share the name “FLANNERY JR ANTHONY FRANCIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INVENSENSE INC
7 patentsUS7442570B2Oct 28, 2008
Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
INVENSENSE INC220 citations98
US7250353B2Jul 31, 2007
Method and system of releasing a MEMS structure
INVENSENSE INC135 citations98
US7104129B2Sep 12, 2006
Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
INVENSENSE INC229 citations98
US6939473B2Sep 6, 2005
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
INVENSENSE INC139 citations98
US7458263B2Dec 2, 2008
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
INVENSENSE INC88 citations97
US7250112B2Jul 31, 2007
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
INVENSENSE INC91 citations97
US7247246B2Jul 24, 2007
Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity
INVENSENSE INC141 citations97