Inventor
CHANG CHAO-FAN
TW4 patents
Patents
4 patentsUS7031786B2Apr 18, 2006
System and method for fabrication backup planning
TAIWAN SEMICONDUCTOR MFG4 citations58
US6963785B2Nov 8, 2005
Method for target queue time calculation in semiconductor manufacturing planning
TAIWAN SEMICONDUCTOR MFG6 citations58
US7206653B1Apr 17, 2007
Wafer-based planning methods and systems for batch-based processing tools
TAIWAN SEMICONDUCTOR MFG3 citations57
US7127314B2Oct 24, 2006
Fabrication monitoring system
TAIWAN SEMICONDUCTOR MFG4 citations57