Inventor
SEO SANG-HUN
KR8 patents
⚠️ This page may combine multiple inventors who share the name “SEO SANG-HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS6767834B2Jul 27, 2004
Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module
SAMSUNG ELECTRONICS CO LTD198 citations98
US6793767B2Sep 21, 2004
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
SAMSUNG ELECTRONICS CO LTD26 citations92
US6534921B1Mar 18, 2003
Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system
SAMSUNG ELECTRONICS CO LTD45 citations92
US7258811B2Aug 21, 2007
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
SAMSUNG ELECTRONICS CO LTD3 citations62
US6465346B2Oct 15, 2002
Conducting line of semiconductor device and manufacturing method thereof using aluminum oxide layer as hard mask
SAMSUNG ELECTRONICS CO LTD2 citations62
US7491344B2Feb 17, 2009
Method for etching an object using a plasma and an object etched by a plasma
SAMSUNG ELECTRONICS CO LTD1 citations51
US6855590B2Feb 15, 2005
Method of manufacturing the semiconductor device intended to prevent a leakage current from occuring due to a gate induced drain leakage effect
SAMSUNG ELECTRONICS CO LTD1 citations51