Inventor
VERWEIJ ANTONIE HENDRIK
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VERWEIJ ANTONIE HENDRIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS11175596B2Nov 16, 2021
Particle traps and barriers for particle suppression
ASML NETHERLANDS BV5 citations71
US10527092B2Jan 7, 2020
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations69
US11898601B2Feb 13, 2024
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11098759B2Aug 24, 2021
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11262663B2Mar 1, 2022
Tubular linear actuator, patterning device masking device and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US7518705B2Apr 14, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US11442369B2Sep 13, 2022
Object stage bearing for lithographic apparatus
ASML NETHERLANDS BV0 citations43
US10656536B2May 19, 2020
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37