Inventor
NAKANO TOMONORI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO TOMONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
15 patentsUS7521675B2Apr 21, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP20 citations92
US7223983B2May 29, 2007
Charged particle beam column
HITACHI HIGH TECH CORP35 citations92
US7504624B2Mar 17, 2009
Charged particle beam device
HITACHI HIGH TECH CORP13 citations84
US7714286B2May 11, 2010
Charged particle beam apparatus, aberration correction value calculation unit therefor, and aberration correction program therefor
HITACHI HIGH TECH CORP11 citations83
US7619218B2Nov 17, 2009
Charged particle optical apparatus with aberration corrector
HITACHI HIGH TECH CORP12 citations83
US7834326B2Nov 16, 2010
Aberration corrector and charged particle beam apparatus using the same
HITACHI HIGH TECH CORP7 citations73
US7531799B2May 12, 2009
Charged particle beam column
HITACHI HIGH TECH CORP7 citations73
US9287084B2Mar 15, 2016
Aberration corrector and charged particle beam apparatus using the same
HITACHI HIGH TECH CORP3 citations71
US7718976B2May 18, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations63
US11069505B2Jul 20, 2021
Aberration corrector and electron microscope
HITACHI HIGH TECH CORP1 citations62
US11004650B2May 11, 2021
Multipole lens, aberration corrector using the same, and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US7915582B2Mar 29, 2011
Method for estimation of probe shape in charged particle beam instruments
HITACHI HIGH TECH CORP5 citations62
US10446361B2Oct 15, 2019
Aberration correction method, aberration correction system, and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US12354826B2Jul 8, 2025
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations48
US9530614B2Dec 27, 2016
Charged particle beam device and arithmetic device
HITACHI HIGH TECH CORP0 citations40
NAKANO TOMONORI
4 patentsUS9378703B2Jun 28, 2016
KVM switch and computer readable medium
NAKANO TOMONORI3 citations71
US8772732B2Jul 8, 2014
Scanning charged particle beam device and method for correcting chromatic spherical combination aberration
NAKANO TOMONORI2 citations60
US8581190B2Nov 12, 2013
Charged particle beam apparatus and geometrical aberration measurement method therefor
NAKANO TOMONORI3 citations60
US8987680B2Mar 24, 2015
Multipole measurement apparatus
NAKANO TOMONORI0 citations38
HIROSE KOTOKO
3 patentsUS8129680B2Mar 6, 2012
Charged particle beam apparatus including aberration corrector
HIROSE KOTOKO7 citations81
US8258475B2Sep 4, 2012
Charged particle radiation device provided with aberration corrector
HIROSE KOTOKO2 citations60
US8558171B2Oct 15, 2013
Charged particle beam apparatus including aberration corrector
HIROSE KOTOKO0 citations49