Inventor
KAVATHEKAR VINAYA
US10 patents
⚠️ This page may combine multiple inventors who share the name “KAVATHEKAR VINAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANNESE PATRICK D
7 patentsUS10444749B2Oct 15, 2019
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D3 citations83
US8972029B2Mar 3, 2015
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D6 citations83
US8775148B2Jul 8, 2014
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D6 citations83
US8639365B2Jan 28, 2014
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D9 citations83
US8473270B2Jun 25, 2013
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D7 citations83
US8612198B2Dec 17, 2013
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D4 citations73
US8639489B2Jan 28, 2014
Methods and systems for controlling a semiconductor fabrication process
PANNESE PATRICK D5 citations72
BROOKS AUTOMATION INC
3 patentsUS7945348B2May 17, 2011
Methods and systems for controlling a semiconductor fabrication process
BROOKS AUTOMATION INC31 citations96
US7899562B2Mar 1, 2011
Methods and systems for controlling a semiconductor fabrication process
BROOKS AUTOMATION INC11 citations92
US7769482B2Aug 3, 2010
Methods and systems for controlling a semiconductor fabrication process
BROOKS AUTOMATION INC22 citations92